| 摘要 |
PURPOSE:To improve accuracy in aligning a projecting position and to simplify the structure and operation of a measuring apparatus, by a constitution wherein a cooling mechanism is driven for horizontal movement, rotation and the like, and the projecting position of light for a material to be measured is changed. CONSTITUTION:In a cooling mechanism, an attaching stage 5 for a material to be measured, and in addition, a temperature regulating heater 6 are connected to a cold head 4 of an He refrigerating machine 3. As a driving mechanism for driving the attaching stage 5 for the material to be measured, a Y-direction moving stage 8 is mounted on an X-direction moving stage 7. A rotary stage 11 is mounted thereon. On the surface of a material to be measured 17, a measur ing prober 18 is provided. A lifting mechanism 19 is set in a chamber. The change in material to be measured 17 is observed by using a microscope 22. Projected light 24 is reflected by a reflecting mirror 25 and projected on the material to be measured 17. When the measuring position of the material to be measured 17 is changed, the material to be measured 17 is driven by a driv ing device.
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