| 摘要 |
An ellipsometric method and an ellipsometer for testing the behaviour with respect to reflection and/or transmission of a test piece S, which contains in the beam path and arranged behind one another at least the following structural groups: - A polariser unit for generating a radiation having a known polarising state, preferably a linearally polarised radiation, of variable azimuth, - a device for mounting the test piece S, - an apparatus Z for analysing the radiation reflected or transmitted by the test piece and which separates the radiation to be investigated into two beams which are polarised linearally and perpendicular to each other, are separated in terms of space and which in each case impinge on a photoelectric detector D. The signals measured at the two detectors are fed to a measurement circuit which divides the signals or sum/difference signals obtained therefrom. The measurement arrangement makes it possible to eliminate different systematic and statistical errors, such as fluctuations in the intensity of light due to temporal deviation or polarisation of the light source as well as the automatic correction of an offset of the polariser position. As a result of the low number of moving elements and of the simple evaluation, rapid measurement is possible.
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