| 摘要 |
PURPOSE:To accomplish improvement of measuring accuracy by defining a reference point on a specimen by means of a sensor unit which senses a light beam radiated onto the specimen placed on a table and measuring dimensions of the specimen by its distance of travel. CONSTITUTION:In order to measure a length of the transversal width of a specimen, the specimen A is set in an offset position from an optical axis CO of a microscope 7. Further, prior to this setting, the focus (o) of the microscope 7 is set in a position flush with the top surface of the specimen A. And, when a light beam 9 is radiated from a light-flashing unit 8, the beam lights up the top surface of a table 5 and as a reflected light beam of the beam 9 does not reach a sensor unit 10, the sensor 10 does not produce any output. Next, when the X-axis travelling bench is operated for displacing the table 5 in the X-axis direction, an end surface of the specimen A reaches the optical axis ao-line of the beam 9 and an output signal is produced by reception of the reflected beam of the beam 9 by means of the sensor unit 10. Further, displacement in the X-axis direction makes reception of the reflected beam of light 9 of the sensor 10 impossible, and consequently, the above output signal is suspended. In the mean time, as a counter unit sends the travelling distance as an electric signal. The dimension of length l of the transversal width of the measuring unit is displayed on a display unit 11.
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