发明名称 |
COMPOSITION FOR CLEANING SURFACE OF SUBSTRATE |
摘要 |
The present invention relates to a composition for cleaning a surface of a substrate, which contains as main components, (a) a halogenated hydrocarbon solvent, (b) a fluorine-containing alcohol and (c) an organic acid. |
申请公布号 |
DE3373561(D1) |
申请公布日期 |
1987.10.15 |
申请号 |
DE19833373561 |
申请日期 |
1983.05.21 |
申请人 |
DAIKIN KOGYO CO., LTD. |
发明人 |
HISAMOTO, IWAO;OMURE, YUKIO |
分类号 |
C09D9/00;C11D7/26;C11D7/28;C11D7/34;C11D7/50;G03F7/42;(IPC1-7):G03F7/26 |
主分类号 |
C09D9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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