| 摘要 |
PURPOSE:To perform a highly accurate temperature measurement with a high reliability by supplying an operating fluid to an operating fluid passage having a constriction in a temperature sensing portion, keeping the pressure difference between both the ends of the constriction constant and measuring the mass flow rate of the operating fluid in the constant pressure difference. CONSTITUTION:When a high pressure operating fluid, for example, Ar gas is supplied from an operating fluid supply source 5, after being caused to flow through a mass flowmeter 7 and a pressure controller 7 and controlled to a constant pressure thereby, the gas is supplied to a passage 3 in a sensor 1 and discharged from an exhaust port 1a via a capillary tube 2 provided on the top of the passage 3. The flow rate of the operating fluid flowing in the capillary tube 2 is measured by the mass flowmeter 7 in terms of a mass flow rate and signals indicative of the flow rate are inputted to an arithmetic unit 10 to be temperature-displayed. When the operating fluid wherein changes in condition with temperature is known in used, the mass flow rate becomes the function of temperature as in a well-known expression. Accordingly, by measuring the quantity of the fluid flowing in the capillary tube 2 in terms of the mass flow rate by the mass flowmeter 7, the temperature of the operating fluid can be learned.
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