发明名称 MANUFACTURE OF X RAY DETECTOR
摘要 PURPOSE:To simplify the production process, by a method wherein a photodiode array is produced on a solid scintillator simultaneously in multiple channels and cut off channel by channel to laminate the solid scintillators and collimators alternately. CONSTITUTION:Strip electrode 2 and 3, a transparent electrode 4, amorphous silicon LEDs 5 and 6 are a metal electrode 7 are evaporated on the surface 1a of a solid scintillator 1 with an area for multiple channels. Then, a pattern 8 of the scintillator is drawn on the electrode 7 by a photoresist corresponding to the number of channels and the scintillator is cut off channel by channel. The scintillator 1 cut into pieces is coated with a light reflecting agent, laminated with collimators 10 alternately and bonded together. Moreover, a conducting rubber connector is interposed between the signal fetching electrodes 2 and 3 of the LEDs and a signal fetching electrode on an auxiliary substrate arranged on the side of the laminate body to connect. This can simplify the production process.
申请公布号 JPS62235588(A) 申请公布日期 1987.10.15
申请号 JP19860078986 申请日期 1986.04.04
申请人 TOSHIBA CORP 发明人 SEKIGUCHI TADASHI
分类号 H01L31/09;G01T1/20;H01L31/00 主分类号 H01L31/09
代理机构 代理人
主权项
地址