发明名称 |
IMAGE DISTORTION-FREE, IMAGE ROTATION-FREE ELECTRON MICROSCOPE |
摘要 |
A transmission electron microscope comprises an imaging electron lens system constituted in at least five stages by an objective lens, a group of intermediate lenses and a group of projector lenses to which excitation currents are applied with alternately different polarities. Lens current control means is provided for controlling the excitation currents in such a manner that the lenses belonging to the intermediate lens group and the projector lens group, respectively, serve as reduction lens when the microscope is operated in a predetermined range of low magnifications, while all the electron lenses serve as magnifying lenses in a predetermined range of high magnitudes. When the magnification is changed over, the lens current control means regulates the excitation currents in such a manner that the difference between the excitation currents supplied to the intermediate lens group and the projector lens group, respectively, is maintained substantially constant. |
申请公布号 |
DE3277263(D1) |
申请公布日期 |
1987.10.15 |
申请号 |
DE19823277263 |
申请日期 |
1982.06.30 |
申请人 |
HITACHI, LTD. |
发明人 |
SHII, KAZUO;KOBAYASHI, HIROYUKI;KUBOZOE, MORIOKI;ISAKOZAWA, SHIGETO |
分类号 |
H01J37/141;H01J37/04;H01J37/10;H01J37/26;(IPC1-7):H01J37/26 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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