发明名称 MAGNETO-OPTICAL RECORDING MEDIUM AND ITS PRODUCTION
摘要 PURPOSE:To decrease stress without deteriorating a recording layer by successively providing a protective layer consisting of a dielectric film having the refractive index changing in the film thickness direction, the recording layer consisting of an amorphous magnetic alloy film and protective layer consisting of a metallic film or dielectric film on a substrate. CONSTITUTION:A magneto-optical recording medium is formed by laminating and forming the films of the 1st protective layer 6 consisting of the dielectric film, the recording layer 7 consisting of the amorphous magnetic alloy film having the axis of easy magnetization perpendicular to the film plane and the 2nd protective layer 8 consisting of the metallic film or dielectric film in this order on the substrate 5. A sputtering gaseous pressure is continuously changed in the stage of forming the film by sputtering in order to change the refractive index of the protective layer 6. The stress is thus decreased without deteriorating the recording layer.
申请公布号 JPS62234253(A) 申请公布日期 1987.10.14
申请号 JP19860077656 申请日期 1986.04.03
申请人 NEC CORP 发明人 TOKI KAORU;NAKADA MASABUMI
分类号 G11B11/10;G11B11/105 主分类号 G11B11/10
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