Apparatus for energy-selective visualisation.

摘要

An apparatus for energy-selective visualisation of a beam of charged particles emerging from an object is equipped with a double-focusing energy analyser (16) which is provided with a two-dimensional entrance diaphragm (18). For the visualisation of both an image and a spectrum an optical imaging system (24) behind the analyser is preferably equipped with one or more quadripole lenses. An illumination system for an object to be examined is preferably equipped with a system for a sequential partial illumination of the object.