| 摘要 |
PURPOSE:To improve measuring accuracy by arranging a space filter changing the transmissivity in stages in a concentric-circle state on a focal plane of a lens and passing the different parts of the space filter according to the size of a tilt angle at each place of the surface to be measured and converting the size of the tilt angle into the intensity of light. CONSTITUTION:A distribution of the intensity of light is measured at each point of a CCD 11 and stored in a memory and its each value is denoted as xin. Next, the space filter 4 is arranged on the Fourier conversional surface and the distribution of the intensity of light at each point of the CCD 11 after passing through the filter 4 is measured and stored in the other memory and its each value is denoted as xij'. When a ratio of these is made xin'/xij=etaij (O<etaij<=1.0), when this interval is divided every 0.1 for instance, according to the size of etaij, it is divided into the steps of 0-0.1, 0.1-0.2, 0.2-0.3,...0.9-1.0 and when the respective steps are displayed with colors such as red, orange, yellow,...blue, etc., the tilt angle is displayed with color on a colour TV for every place of an object to be measured.
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