| 摘要 |
PURPOSE:To improve detecting accuracy by providing a detector main body having plural temperature detection ends and detecting the abnormality via the temperature detected by the temperature detection ends. CONSTITUTION:The detector main body 10 provided with the plural temperature detection ends 12 is mated with a step part of a work table 8 and the positioning is performed. On this occasion, the detections ends are arranged fixedly on the detector main body 10 so that the tips of the detection ends are aligned with respect to a through hole 11 of laser beams 2. The laser beams 2 are projected and the radiant heat by the laser beams 2 is detected by the plural temperature ends such as thermocouples, etc., and compared with a preset normal detection output range. At this occasion, when a laser beam focus 7 is deviated, the detected temperature is different from a value at the normal time and the deviation of the focus 7 can be quickly detected. Accordingly, in this way, the abnormality detecting accuracy can be improved. |
