发明名称 SOLID SHAPE DETECTOR
摘要 PURPOSE:To easily process the asymmetry and solid information of an object to be observed by projecting the different luminous flux on the object to be observed and abstracting a solid shape of the object to be observed from a difference of respective information signals by the reflected beams of light. CONSTITUTION:When the luminous flux is projected on the object 8 to be observed from the 1st direction by a projection means 100, the reflected flux is photodetected with a photodetection means 200 and converted into the information signals. Next, when the luminous flux are projected from the 2nd direction, the reflected flux is photodetected with the photodetection means 200 and converted into the information signals. The respective information signals obtained with the photodetection means 200 are inputted to a abstraction means 300 and the difference of those signals is calculated and the solid shape of the object 8 to be observed is abstracted from the calculated result.
申请公布号 JPS62233706(A) 申请公布日期 1987.10.14
申请号 JP19860077924 申请日期 1986.04.03
申请人 NIKON CORP 发明人 UEHARA MAKOTO;MATSUMOTO KOICHI;KAWAI HIDEMI
分类号 G01B11/24 主分类号 G01B11/24
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