| 摘要 |
<p>PURPOSE:To enhance quality of a coated film and to simplify the title method without forming an intermediate protective film and also without damaging a sublayer pattern by performing natural drying treatment or low-temp. drying treatment just after coating a film and thereafter performing drying treatment at comparatively high temp. CONSTITUTION:In drying of a coated film which has polyimide resin as an essential component and covers a sublayer pattern, the coated film 12 is firstly dried at low temp. in comparison with b.p. of the solvent incorporated in polyimide precursor soln. Successively drying treatment is performed by heating it at the temp. near to b.p. In such a way, the great parts of the solvent incorporated in the coated film 12 are removed in the first stage and the coated film 12 loses fluidity and only slight amount of the solvent is present in the second stage. Therefore even if an intermediate protective layer is eliminated, the existing sublayer pattern is not damaged.</p> |
