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发明名称
ANGLE MEASURING PLANE-MIRROR INTERFEROMETER SYSTEM
摘要
申请公布号
JPS62233708(A)
申请公布日期
1987.10.14
申请号
JP19870070162
申请日期
1987.03.23
申请人
ZYGO CORP
发明人
GEARI II SAMAGUREEN
分类号
G01B9/02;G01B11/26
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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