| 摘要 |
PURPOSE:To form a magnetic thin film superior in magnetic characteristics on a substrate by means of a miniaturized device, by installing an auxiliary magnetic field generating device which generates the magnetic field nearly parallel to the one generated by a main magnetic field generating device in a magnetic film forming device. CONSTITUTION:A magnetic film forming device is composed of a target 10, a substrate 6, a substrate holder 3 holding the substrate 6, a main magnetic field generating device 1 which impresses the magnetic field on the substrate 6plane, and a vacuum container 7 housing their parts. And, an auxiliary magnetic field generating device 14 which generates the magnetic field nearly parallel to that generated by the device 1 is installed. Then, a magnetic field, which is uniform and parallel to the substrate 6 plane, is generated over a wide range on the holder 3. Hence, a magnetic thin film superior in magnetic characteristics is formed on the substrate 6 by means of this miniaturized device.
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