发明名称 Dot-etchable image-containing element useful in lithographic mask formation and its production
摘要 A reducible image-containing element which comprises a support material and a photopolymerized layer provided thereon, said photopolymerized layer having an image area which is cured at the upper part and not cured at the lower part, said non-cured lower part containing at least one of polyvalent phenols and their derivatives in an amount effective in preventing said non-cured lower part from curing.
申请公布号 US4699859(A) 申请公布日期 1987.10.13
申请号 US19840648095 申请日期 1984.09.07
申请人 TOYO BOSEKI KABUSHIKI KAISHA 发明人 FUJIMURA, TOSHIAKI;KATOH, YOSHIO;IMAHASHI, SATOSHI;SETO, KOICHI;TANAKA, SHINICHI
分类号 G03F1/10;(IPC1-7):G03C1/68;G03F7/02 主分类号 G03F1/10
代理机构 代理人
主权项
地址