| 摘要 |
PURPOSE:To improve positioning precision and output torque, by arranging a yoke and a mover having minute teeth in a chemical etching process, and by setting the yoke on the side of a stator to be wound up with an exciting coil. CONSTITUTION:A linear pulse motor is provided with a yoke 1, an exciting coil 2, a mover 3, a permanent magnet 4, a retainer 5, a yoke base 6, rollers 7, and plate springs 8. At the tips four rectangular parallelopiped sections of the yoke 1, teeth 11 processed by chemical etching are respectively formed. In the same manner, also on the mover 3, teeth 31 with the same shape as the teeth 11 are formed in a comblike form by chemical etching. Besides, on both the side sections of the retainer 5, a plurality of hard balls 51 are arranged, and a slight space between the yoke 1 and the mover 3 is retained. Then, by excitation of the exciting coil 2, the mover 3 is linearly moved, and by the retainer 5, an optimum gap between the yoke 1 and the mover 3 is kept.
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