| 摘要 |
<p>PURPOSE:To accurately measure the thickness of a surface layer without receiving the effect of an external condition by one measuring system, by a method wherein infrared rays are incident on an article to be measured through an opening and closing means and the reflected rays are discriminated so as to be classified by opening and closing modes to be subjected to signal processing. CONSTITUTION:Infrared rays of a reference infrared ray source 5 are reflected by a spherical or non-spherical mirror 3 and a painted strip plate 1 through a chopper 6 to be condensed to an infrared ray sensor 12 through a rotary sector 9. Because a notch 7 is provided to the chopper 6 and a filter 10 is provided to the sector 9, four operation modes are generated by the rotation of the chopper 6 and the sector 9 and the mode to which the signal of the sensor 12 belongs is discriminated by a mode discrimination device 14 and the thickness of the film 12 on the specimen 1 is measured by a film thickness conversion device 15. Therefore, the thickness of a surface layer can be accurately measured by one ray measuring system without receiving the effect of the temp. of a specimen, the variation in the characteristics of a ray source and the change in the characteristics of an optical system etc.</p> |
