| 摘要 |
PURPOSE:To make the surface of a stamper into flatness preventing a resin from being left on the surface of the stamper, by sticking and fixing the surface of the stamper formed by peeling from a regist master disk, at a stiffening plate using an ultraviolet ray hardening resin, and peeling the stamper off the stiffening plate after polishing the rear plane of the stamper. CONSTITUTION:On a stamper 6 peeled from the regist master disk in which a dissolution eliminating process for a residual regist is completed, an alicyclic acrylate 10 that is the ultraviolet ray hardening resin is coated by a spin coating method, and a stiffening plate 9 made of a disk-shaped glass plate having a thickness of 6mm is placed on the stamper, and an ultraviolet ray is irradiated, then the stiffening plate is stuck and hardened. Next, the stiffening plate 9 is set on a turntable, and the rear plane of the stamper 6 is polished through the use of a wrapping tape, and the rear plane is polished so that the irregularity of more than 100mum at first is reduced below 0.1mum, by using an abrasive grain having a grain size of 1mum finally. And after polishing, the stamper is peeled off and separated by inserting a blade whose tip is sharp to an interface between the ultraviolet ray hardening resin 10 and the stamper 6.
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