| 发明名称 |
Method of producing fluoride-sensitive diaphragms |
| 摘要 |
A method of manufacturing diaphragms which are sensitive to fluoride ions, by depositing a poly-crystalline thin layer of difficulty soluble fluoride of 20 nm to 5,000 nm thick by means of sputtering or vaporization onto a substrate at temperatures of above 280 DEG C.
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| 申请公布号 |
US4699806(A) |
申请公布日期 |
1987.10.13 |
| 申请号 |
US19850763359 |
申请日期 |
1985.08.07 |
| 申请人 |
VEB WASCHGERAETEWERK SCHWARZENBERG |
发明人 |
FAIT, MARTIN;GUENTHER, THOMAS;JANIETZ, PETER;MORITZ, WERNER;MUELLER, LOTHAR;WELLNER, HANS |
| 分类号 |
G01N27/40;C23C14/06;G01N27/333;(IPC1-7):B05D5/12 |
主分类号 |
G01N27/40 |
| 代理机构 |
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