| 摘要 |
PURPOSE:To stabilize the quality of a film and to improve the quality of appearance, by forming a connecting hole part, which penetrates an amorphous semiconductor layer by the projection of laser light along the aligning direction of a plurality of first electrodes, and electrically connecting second electrodes to the neighboring first electrodes through the connecting hole part when a plurality of the second electrodes are formed on the amorphous semiconductor layer. CONSTITUTION:On a substrate 1, first electrodes 2a-2c and extended parts 21a-21c for connection are simultaneously formed. An amorphous semiconductor layer 3 is deposited so as to cover the electrodes and the extended parts completely. A connecting hole part 5, which is formed by the projection of laser light, penetrates the amorphous semiconductor layer 3. A plurality of second electrodes 4a-4c corresponding to the first electrodes 2a-2c are formed on the amorphous semiconductor layer 3. Extended parts 4la-41c for connection are electrically connected to the extended parts 21a-21b of the first electrodes for connection. |
