| 摘要 |
PURPOSE:To enable highly selective manufacture of Fe3N which is excellent in corrosion resistance and magnetic characteristics by advancing reaction supplying a compound gas which contains an iron atom and a compound gas which contains a nitrogen atom, generating plasma by applying electromagnetic energy and controlling the temperature of a deposited substrate in optimum. CONSTITUTION:A mixed gas 1 of H2 and NH3 is supplied to a plasma reactor 4 and the quantity of the supplied gas is adjusted and measured by a mass flow controller 2. The pressure in the plasma reactor 4 is reduced by a rotary vacuum pump 15, high frequency is generated from a high frequency oscillator 5, supplied to the plasma reactor 4 via a matching unit 6 and a coil type electrode 7 and the energy forms the mixed gas of H2 and NH3 plasma 3. An iron carbonyl 11 is supplied via a ring type nozzle 12 to the plasma reactor 4 accompanied by a carrier gas 8 Ar and the quantity of the supplied Ar is measured by a mass flow controller 9. The quantity of the iron carbonyl is also obtained by the difference of a mass flow controller 10 and the mass flow controller 9.
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