| 摘要 |
PURPOSE:To efficiently form thin film on a substrate with a small-sized and compact device by the film-like substrate in plural pieces of reaction chambers disposed around a central differential discharge chamber via said chamber through slits in common use as differential discharge holes. CONSTITUTION:An intake chamber 2, a cleaning chamber 3, reaction chambers 4I-4III and take-out chamber 5 are disposed around the central differential discharge chamber 1 of a polygonal shape segmented to the plural divided discharge chambers 1A-1E by radial partition walls 8. The film-like substrate FB un-wound from a feed roll 11 in the chamber 2 is successively passed by guide rollers 19, 20 in the discharge chambers 1A-1E, then through the chambers 3, 4I-4III provided with film forming rolls 12 contg. heaters H and RF electrodes 14. After the surface of the substrate is cleaned and is formed with the film in the above-mentioned manner, the substrate is taken up on a taking-up roll 13 in the take-out chamber 5. The slits 6 to allow the passage of the substrate FB in common use as the differential discharge holes for both chambers are provided between the central differential discharge chamber 1 and the chambers 2-5.
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