| 摘要 |
PURPOSE:To measure the inclination and height of an objective surface with high accuracy through simple constitution by making laser beams incident on an ideal surface almost at right angles and slantingly to the objective surface and measuring the quantities of displacement of their reflected beam. CONSTITUTION:A laser beam emitted by a laser device 1 is split by a half- mirror 2 in two directions. One is incident on the ideal surface 301 of a magnetic head 3 to be measured almost at right angles and its reflected beam is incident on a projection screen 6. Then, the angle (inclination) between the objective surface 302 and ideal surface 301 is found from the quantity of displacement of the spot of the reflected beam which is found visually. The other laser beam, on the other hand, is incident on the ideal surface 301 slantingly at an angle thetaand its reflected beam is incident on a linear position sensor 9. This sensor 9 measures the quantity of displacement of the spot of the reflected beam to find the deviation in height between the objective surface 303 and ideal surface 303.
|
