| 摘要 |
PURPOSE:To improve the efficiency of utilization of a ferromagnetic material in a target by forming the parts of the target confronting the magnetic poles of a magnetron with a thick ferromagnetic material and the other part with a thick nonmagnetic material. CONSTITUTION:The parts of a plate-shaped target confronting the magnetic poles M of a magnetron are formed with only a thick ferromagnetic material 3a, or with the material 3a and a thin nonmagnetic material 4b. The other part is formed with only a thick nonmagnetic material 4a, or with the material 4a and a thin ferromagnetic material 3b. The nonmagnetic materials 4 exert no unfavorable influence on the sputtering of the ferromagnetic materials 3. Accordingly, the proportion of the ferromagnetic materials 3 remaining after sputtering without consuming to the whole target is reduced. The efficiency of utilization of the ferromagnetic materials 3 is improved and the service life of the target can be prolonged. |
