| 摘要 |
PURPOSE:To make it possible to observe the surface of a sample accurately even though the sample has a deep groove-form pattern, by furnishing a collector to collect the secondary electrons close to and parallel to the surface of the sample. CONSTITUTION:When electron beams are scanned over the surface of a sample 3, secondary electrons are generated. The secondary electrons are collected by a collector 9 on the surface of the sample 3 in the direction vertical to the sample surface. Therefore, such secondary electrons that are generated from the bottom of a deep groove-form pattern can be collected easily by the collector 9. The secondary electrons collected by the collector 9 are further collected by a collector 5a in the direction of a scintillator 6, output from a photoelectron multiplier tube 8 as a secondary electron detecting signal, after passing through the scintillator 6 and a photopipe 7, and the sample surface is displayed on a CRT. Since the secondary electrons generated even at the bottom of the deep groove-form pattern can be collected easily in such a way an accurate observation can be realized.
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