| 摘要 |
PURPOSE:To suppress a decrease in threading peculiar to high-molecule and high-viscosity resist, by performing resist coating with a coating container being in a closed state. CONSTITUTION:A receiving-tray 4 having recessed parts 4a, and a mask chuck 6 rotating and supporting a mask blank 7 are installed inside a cylindrical coating container 1, and exhaustion ports 3 are installed above the periphery of the container 1, and a closing cover 8 is above it, so that a resist coating device is composed. Then, after rotational coating of resist is performed on the mask blank 7 with the coating container 1 being in a closed state, the rotation is stopped prior to drying the resist surface. Then, whil the coating container 1 is changed from being in its closed state to being in an open-space one, the resist is dried.
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