| 摘要 |
PURPOSE:To prevent a flare phenomenon from occurring by providing a metal light-screening film coated with a film having low optical reflectivity on an upper surface. CONSTITUTION:A sensor unit 5 and a charge transfer unit 6 are formed on a semiconductor substrate l, and a metal light-screening film 7 is formed on the upper surface of the unit 6 to prevent a light from being incident to the unit 6. A film 8 having low optical reflectivity is superposed on the film 7. The film having low reflectivity employs an amorphous silicon film or a polycrystalline silicon film. A flare phenomenon is prevented by the combination of the light intercepting property to the charge transfer unit and the film having low reflectivity for preventing the reflection from the film. Since the film 7 is coated with the film having low reflectivity such as the film 8 like the amorphous silicon film, the reflectivity from the film 7 decreases to resultantly obtain a flare preventing effect. |
