摘要 |
PURPOSE:To attain highly accurate aligning by pressing an aligning pin moving in a specific direction in contact with a peripheral face of a disk base placed on an aligning stage for the aligning and carrying the said base to a contact stage. CONSTITUTION:The disk base 2 is placed on the aligning stage 1, three or over of pins 3 moved in a direction of point 1a while keeping an equal interval are moved to the center point 1a of the stage 1 and pressed into contact onto the peripheral face of the base 2. Thus, the center of the base 2 is set to be coincident with the point 1a. Then the base 2 is adsorbed to an adsorbing part 5a of a carrying body 5 and carried on a contact stage 7, where a guide pattern is formed to the base 2. The center of the adsorbing part 5a is selected so as to be made coincident with the center of the stage 7 and the center of the guide pattern. Thus, the center of the guide pattern is made accurately coincident with the center of the base 2.
|