Method for the continuous detection of dissolved and undissolved impurities in highly pure process liquids

摘要

A method is described for the continuous detection of undissolved and relatively nonvolatile, dissolved impurities in highly pure process liquids. The method is based on taking a substream from the liquid to be monitored and converting it into the aerosol phase. After evaporation of the liquid droplets, dissolved and undissolved impurities remain as electrically charged residual nuclei which are separated from the liquid vapour molecules in an electrometer arrangement and can be detected.