METHOD OF FILLING PASSAGE OR CONTACT HOLE IN LAYER INSULATORIN MULTILAYER METAL COVERED VERY LARGE SCALE INTEGRATED CIRCUIT,申请号JP19870041574-传众专利搜索

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发明名称	METHOD OF FILLING PASSAGE OR CONTACT HOLE IN LAYER INSULATORIN MULTILAYER METAL COVERED VERY LARGE SCALE INTEGRATED CIRCUIT
摘要
申请公布号	JPS62229959(A)	申请公布日期	1987.10.08
申请号	JP19870041574	申请日期	1987.02.26
申请人	GENERAL ELECTRIC CO <GE>	发明人	DEERU MARIUSU BURAUN;BAANAADO GOROUITSUTSU;RICHIYAADO JIYOSEFU SAIA
分类号	H01L21/3205;H01L21/768	主分类号	H01L21/3205
代理机构		代理人
主权项
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