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经营范围
发明名称
PLASMA GENERATOR
摘要
申请公布号
JPS62229795(A)
申请公布日期
1987.10.08
申请号
JP19860073679
申请日期
1986.03.31
申请人
ANELVA CORP
发明人
NOGAMI YUTAKA
分类号
H05H1/14
主分类号
H05H1/14
代理机构
代理人
主权项
地址
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