| 摘要 |
PURPOSE:To enhance measuring accuracy, by integrally providing heater layers to both sides of an electrochemical cell in the laminated direction thereof and providing a temp. measuring element detecting the temp. in the vicinity of an electrode in a laminated structure to integrally baking both of them. CONSTITUTION:An oxygen sensor element 2 is formed by a method wherein a sensor cell being an electrochemical cell consisting of a heater layer 22, solid electrolyte bodies 18, 17, a solid electrolyte body 10 and the measuring electrode 12 and reference electrode 14 provided so as to be contacted with both side surfaces of said electrode body 10; a pump cell being an electrochemical cell consisting of a diffusion chamber 16, a temp. measuring element resistor layer 42, a solid electrolyte body 4 and the inside pump electrode 6 and outside pump electrode 8 provided so as to be contacted with both side surfaces of said electrolyte body 4; and a heater layer 24 are successively laminated to form an integral laminated structure which is, in turn, bakes. By this constitution, the temp. distribution of the sensor element in the laminated direction thereof can be kept uniform and constant, and measuring accuracy can be enhanced. |
