| 摘要 |
PURPOSE:To enable highly accurate measurement of an edge profile of an object to be measured at a high speed, by intercepting a radiation except for the edge part of an object being measured under a proper control to block the generation of useless scattered radiation otherwise causing errors. CONSTITUTION:Prior to the measurement, a driving control signal is sent out to retreat a sample 161 to a sample moving mechanism 16 from an edge tracing control means 24 and based on the signal, the sample 161 is retreated outside of an edge section 11b by a rotary driving source 166 to start a profile measuring operation. Under such a condition, when a data measuring start command is given, artificially or based on a program, a radiation control section 23 receiving a drive start control signal from a system controller 22, drives a radiation generator 14 to irradiate a fan-like radiation beam 13 near the edge part 11a of an object 11 to be measured therefrom 14. The radiation 13 irradiated from the radiation generator 14 is transmitted through the object 11 being measured in such a manner as to be attenuated near the edge part 11a according to the thickness thereof. |
