| 摘要 |
PURPOSE:To enable highly accurate measurement of a profile of an edge part of an object at a high speed, by applying a software-oriented correction with detection characteristics of a multichannel detector taken into consideration. CONSTITUTION:A radiation emitted from a radiation generator 12 is transmitted through an object 10 to be measured in such as manner as to be attenuated near the edge part 10a thereof according to the thickness thereof while reaching a multichannel detector 14 as intact without being attenuated at any other part than the edge part 10a. The radiation is converted into an electrical signal proportional to the intensity thereof and then, sent to a data collector section 15 as detection data divided into channels. At this point, a CPU224 sends a timing signal to a transmission control section 15b through an interface 225 based on a data processing program of an ROM22 and reads the detection data divided into channels as amplified with a preamplifier 15a according to a data processing procedure to be stored into the memory of a thickness converter section 21. After a thickness calculation is performed therewith, edge channels are discriminated while a correction parameter is determined according to the thickness to perform a correction processing.
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