PRODUCTION OF THIN TITANIA FILM

摘要

PURPOSE:To form a thin titania film of a small thickness with high adhesion by dissolving diisopropoxybisacetylacetonatotitanium and isopropoxytitanium octyleneglycolate in an org. solvent and applying the resulting soln. to a heated substrate. CONSTITUTION:Diisopropoxybisacetylacetonatotitanium and isopropoxytitanium octyleneglycolate are dissolved in about 3/7-7/3 molar ratio in an org. solvent such as methylene chloride by about 2-10wt% (expressed in terms of formed titania). The resulting soln. is sprayed on a plate-shaped substrate of ceramics or the like kept at 400-800 deg.C to form a thin titania film by the thermal decomposition of the compounds. By this method, a thin titania film of a large area having uniformity and adhesion comparable to those of a film formed by CVD can be produced.