| 摘要 |
PURPOSE:To prevent a slip in position of wafers due to vibration, and storing the horizontal wafers smoothly and reliably in a wafer storing cassette, by inclining the cassette and also inclining a swiveling shaft of a swiveling arm for transporting the wafers. CONSTITUTION:When a piston rod 15 of a cylinder 17 is contracted, a catch plate 12 passes by a position plate 16 without colliding therewith, and is allowed to be lowered to a position 12'. In the pass of the catch plate 12 by the position plate 16, a wafer mounted on the catch plate 12 is transported to the position plate 16, and is slid down into a storing case 13. Thus, the wafer is stored at 1f. As the storing case 13 has an upward inclined opening 13a, there is no possibility that the stored wafer 1f is slipped in position or dropped because of vibration and impact.
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