| 摘要 |
PURPOSE:To correct the eccentricity of a support adaptor with good accuracy, by mounting an object to be tested to the support adaptor at three or more kinds of mount angles and averaging the eccentricity vectors obtained as a result to calculate an average vector. CONSTITUTION:An object 41 to be tested is mounted to a measuring main shaft 43 through a support adaptor 42. The displacement of the center of rotation of the main shaft 43 is inputted to an addition circuit 12 as a displacement signal 31 and the output thereof is guided to a synchronous rectifier circuit 13 to be applied to an operation circuit 14 as X- and Y-deflection vector signals 32X, 32Y. The output from the circuit 14 is applied to a vector forming circuit 16 to be applied to the circuit 12 to be converted to a correction vector signal 33 which is, in turn, rotated by 180 deg. to be added to a given signal 31 in the addition circuit 12. In the above mentioned constitution, the angle obtained by dividing 360 deg. by an integer of 3 or more is set to M deg.. Then, the mount angle of the object 41 to be tested to the support adaptor 42 is differentiated by M deg. to perform N kinds of balance tests and N kinds of average values are applied to the circuit 16 by the circuit 14. By this method, the object 41 to be tested is mounted in an arbitrary direction.
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