PROCESS FOR FORMING PATTERN WITH NEGATIVE RESIST,申请号EP19840302145-传众专利搜索

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发明名称	PROCESS FOR FORMING PATTERN WITH NEGATIVE RESIST
摘要
申请公布号	EP0124265(B1)	申请公布日期	1987.10.07
申请号	EP19840302145	申请日期	1984.03.29
申请人	OKI ELECTRIC INDUSTRY COMPANY, LIMITED	发明人	YAMASHITA, YOSHIO OKI ELECTRIC INDUSTRY CO. LTD.;KAWAZU, RYUJI OKI ELECTRIC INDUSTRY CO. LTD.
分类号	G03F7/022;(IPC1-7):G03F7/08	主分类号	G03F7/022
代理机构		代理人
主权项
地址

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