| 摘要 |
PURPOSE:To prevent the failure of optical parts, etc., by providing a laser oscillator for checking misalignment in addition to a laser oscillator for processing and disposing a position detecting sensor for return laser light and reflecting mirror which can be changed over to the optical axis. CONSTITUTION:The laser oscillator 30 is constituted of the laser oscillator 32 for processing and the laser oscillator 33 of low output for checking the misalignment. A shutter plate 38 which can change over a laser light passage hole 39 and the reflecting mirror 50 is disposed to a torch 31. A semiconductor position detecting element 40 which receives the return laser light reflected and transmitted by the mirror 50 is installed to the oscillator 30 side. The oscillator 33 is operated and the return laser light reflected by the mirror 50 is made incident on the detecting element 40 in the case of detecting the misalignment of the laser light axis. A control device 43 calculates the misalignment from the signal thereof and displays an alarm on a display panel 44. Since the misalignment of the optical axis is predicted, the failure of the optical parts, etc., is prevented by the above-mentioned method. |
