发明名称 |
Apparatus for exciting a plasma in a column of gas by means of microwaves, in particular for providing an ion laser |
摘要 |
A waveguide (130) is coupled to a tubular member (2) by a gap (139) suitable for generating an intense surface wave in a gaseous mixture contained in the tubular member (2). Short circuits (110 and 120) delimit the plasma, thereby generating very high intensity standing microwaves, which increase the energy density of the plasma. An ion laser effect can then be observed, in particular in a mixture of argon and helium, together with optional krypton.
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申请公布号 |
US4698822(A) |
申请公布日期 |
1987.10.06 |
申请号 |
US19860845318 |
申请日期 |
1986.03.28 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) |
发明人 |
LEPRINCE, PHILIPPE;MAREC, JEAN;SAADA, SERGE;BLOYET, EMILE;MIGNE, JACQUES |
分类号 |
H01L21/302;H01L21/3065;H01P7/06;H01S3/032;H01S3/041;H01S3/0975;H01S3/22;H01S3/227;H05H1/46;(IPC1-7):H01S3/03 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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