| 摘要 |
PURPOSE:To accurately control the equilibrium concn. of carbon only by the measurement of the concn. of O2 in an atmospheric gas by estimating the concn. of CO in an atmosphere from the amount of an enriching gas added (the output of a gas controller). CONSTITUTION:The difference between the set concn. of CO in a base gas and the product of the output of a PID arithmetic unit and a percentage is inputted in a primary delay circuit, and the resulting output is regarded as the concn. of CO in an atmospheric gas. The C potential of an atmosphere is calculated from the concn. of CO, the measured concn. of O2 in the atmospheric gas, and the temp. of the atmosphere. The difference between the calculated C potential and the set C potential is calculated with the PID arithmetic unit, and the flow rate of an enriching gas is controlled according to the resulting value.
|
