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发明名称
摘要
申请公布号
JPS62157162(U)
申请公布日期
1987.10.06
申请号
JP19860044987U
申请日期
1986.03.27
申请人
发明人
分类号
H01L21/52;H01L21/28;H01L21/58;H01L29/43;H01L29/861;(IPC1-7):H01L29/91;H01L29/46
主分类号
H01L21/52
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代理人
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