| 摘要 |
PURPOSE:To shorten the measurement time by profiling a work shape by a profile function, deriving an approximate value of a Z-coordinate of each measuring point to which X- and Y-coordinates have been designated, and thereafter, using a three- dimensional measuring function. CONSTITUTION:A profile control device measures a Z-coordinate by a three-dimensional function, at every measuring point of which X- and Y-coordinates have been designated in advance on a work 1 which becomes an object to be measured. In this case, by using a profile function of this device, a shape of the work 1 is profiled by a stylus 2, and an approximate value of its Z-coordinate in each measuring point is derived. Subsequently, a measurement state point which has been separated by a prescribed distance Zof from the approximate value is set so as not to contact the work 1 at the measuring point. Also, from a movement state point of the upper part by a prescribed value which has been determined in advance, the stylus 2 is made to descend by a fast forward mode to the measurement start point along the broken line. It is made to descend therefrom at a measuring speed until it contacts the work 1, and an exact Z-coordinate of the measuring point is derived. Subsequently, the stylus 2 is made to ascend along a path of the broken line, and thereafter, an exact Z- coordinate of each measuring point is derived in the same way.
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