| 摘要 |
PURPOSE:To obtain a requested invert ratio without damaging the stability of a conduction controlled flow rate, by performing the conduction control of a fluid in a flow rate to be followed based on a deviation between a flow rate estimation value in a passage to be followed and a targeted flow rate estimation value, when the flow rate in the passage which becomes a reference is varied steeply by a disturbance. CONSTITUTION:Since the targeted flow rate value against a flow rate controller 19 is varied when the disturbance is generated in a reference passage (l), an operating signal outputted from the flow rate controller 19 is varied, and as a result, the aperture of a flow rate control valve 25 is varied. In such a case, since a corresponding delay is generated which is caused by the characteristic of the control valve 25 consisting of such type flow rate control device, in the valve, a change in the flow rate estimation value ratio between the reference passage (l) and a follow up passage (m), is generated. A flow rate estimation controller 17 varies the operating signal based on the deviation at a time when the disturbance is generated in the reference passage (l), and outputs a varied operating signal to the flow controller 19 through an adder 15. The flow rate controller 19, when the above corrected operating signal is inputted, adjusts the aperture of the control valve 25 so as to eliminate the deviation of the flow rate estimation value, that is, a volume deviation.
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