| 摘要 |
PURPOSE:To improve the reliability of the inspection discrimination and defect detection by calibrating the inspection discrimination of signal processing in accordance with the result of the comparison of the detection signal of an IR detector and predetermined reference level. CONSTITUTION:The detection signal lr of the IR detector 1 is inputted via an amplifier 4 to a signal processor 5 by which the inspection discrimination such as defect detection is executed. The signal lr is inputted to a divider 7 of an inspection discrimination level setter 6 as well and is divided by the preset reference level lo. The output thereof lr/lo is inputted to a calibrator 8. The initial inspection discrimination level ho is calibrated by the output signal of the divider 7 in the calibrator 8 and the inspection discrimination level hr after the calibration is delivered to the processor 5. More specifically, the inspection discrimination level hr of the processor 5 is calibrated in accordance with the result of the comparison between the detection signal lr and the reference level lo and therefore, the inspection discrimination is not affected by the sensitivity of the IR detector even when there is a fluctuation in the sensitivity of the IR detector. The reliability of the inspection discrimination and defect detection is thus improved.
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