| 摘要 |
PURPOSE:To make exact quantitative analysis of a sample by providing a means for locking an electron ray or sample in the stage of fixing the point at which the electron ray irradiates the sample and means for integrating the output signal of a detector. CONSTITUTION:Scanning signals are fed from scanning signal generating circuits 12x, 12y to deflecting coils 7x, 7y so that the electron ray EB is scanned on a front focal plane U of an objective lens 10, then the electron ray EB is two- dimensionally locked in the state of fixing the incident point on the sample 11 at the analyzing point. The Auger electrons ae are generated from the sample 1 according to the locking of the electron ray EB and the generated electrons ae are detected 23 via an analyzer 20. The output thereof is amplified 24 and is converted to a pulse signal which is counted 26. A CPU 21 feeds a control signal to a sweep signal generator 22 at every lapse of the specified time T to increase the generated 22 sweep signal by one step. The CPU 21 displays the Auger electron spectra on a CRT 27 in accordance with the data on the integrated count value of the respective energy values stored 29 therein upon lapse of the time nT. |
