| 摘要 |
PURPOSE:To prevent the contamination of the inner wall surface of a specimen jet nozzle, by keeping the temp. of the surface of the specimen jet nozzle higher than that of the specimen passing through the nozzle. CONSTITUTION:A heater 8 is mounted to the nozzle 2 of specimen gas 1 and the temp. of the gas 1 in the nozzle 2 detected by a sensor 9. On the basis of the detection value, the heater 8 is controlled by a temp. controller 10 so as to keep the temp. of the inner wall of the nozzle 2 higher than that of the gas 1. By this constitution, because a gaseous molecule easy to condense is not condensed on the wall surface, the adhesion of particles to the wall surface can be prevented.
|
