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发明名称
FORMATION OF SELF-ALIGNING METAL CONTACT
摘要
申请公布号
JPS62224977(A)
申请公布日期
1987.10.02
申请号
JP19870062337
申请日期
1987.03.16
申请人
SIEMENS AG
发明人
YOOZEFU UIRAA
分类号
H01L29/417;H01L21/285;H01L21/338;H01L29/812
主分类号
H01L29/417
代理机构
代理人
主权项
地址
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