| 摘要 |
PURPOSE:To improve the uniformity of temperature distribution and to reduce energy consumption by a method wherein lamps are placed from outside where large round radiation lamps are arranged and to inside where small radiation lamps are arranged, and gold-plated aluminum is used for a lamp house. CONSTITUTION:A halogen lamp 2 for the lamp anneal device of a semiconductor manufacturing device is formed in a round shape. 7 lamps are used, each lamp is controlled, gold-plated aluminum is used for lamp house 1 to improve the temperature distribution around the material to be heat-treated. By doing so, the temperature distribution data is improved from + or -10% to 3%, and the number of lamps is reduceded from 15 to 7, that is to say, 50A to 30A, thereby conserving energy. |
